FORMATION OF SECONDARY CLUSTER IONS DURING SPUTTERING OF SILVER AND COPPER

被引:25
作者
FRANZREB, K
WUCHER, A
OECHSNER, H
机构
[1] Fachbereich Physik, Universität Kaiserslautern
来源
PHYSICAL REVIEW B | 1991年 / 43卷 / 18期
关键词
D O I
10.1103/PhysRevB.43.14396
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
By simultaneous measurements of neutral and ionized clusters sputtered from polycrystalline silver and copper, the absolute ionization probabilities alpha-X(n)+ for the formation of the corresponding secondary ions X(n)+ (n = 1,...,4) are determined. The alternating abundance of Ag(n)+ and Cu(n)+ is discussed quantitatively in terms of microscopic models for surface ionization. At least for silver clusters this effect is ascribed to an alternation of the ionization probability induced by the different ionization potentials of the sputtered clusters, which were also measured.
引用
收藏
页码:14396 / 14399
页数:4
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