MEASUREMENTS OF ENERGY-DISTRIBUTIONS AND YIELDS OF NEUTRAL CU-2 AND CU-3 SPECIES SPUTTERED FROM CU BY LOW-ENERGY AR+ IONS

被引：31

作者：

BRIZZOLARA, RA ^{[1
]}

COOPER, CB ^{[1
]}

机构：

[1] UNIV DELAWARE,DEPT PHYS,NEWARK,DE 19716

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 43卷 / 02期

关键词：

D O I：

10.1016/0168-583X(89)90026-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：136 / 145

页数：10

共 32 条

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[2] ENERGY-DISTRIBUTIONS OF NEUTRAL ATOMS SPUTTERED BY VERY LOW-ENERGY HEAVY-IONS
BRIZZOLARA, RA
COOPER, CB
OLSON, TK
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 35 (01) : 36 - 42
[3] EXPERIMENTS ON THE SPUTTERING OF NEUTRAL CU-2 DIMERS FROM CU BY AR+ IONS (60-300 EV)
COOPER, CB
HAMED, HA
[J]. SURFACE SCIENCE, 1984, 143 (01) : 215 - 222
[4] INTERNAL ENERGY-DISTRIBUTION OF SPUTTERED SULFUR MOLECULES
DEJONGE, R
BALLER, T
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DEVRIES, AE
SNOWDON, KJ
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 17 (03) : 213 - 226
[5] GARRISON B, 1979, J VAC SCI TECHNOL, V16, P77
[6] MASS-SPECTROMETRY OF NEUTRAL MOLECULES SPUTTERED FROM POLYCRYSTALLINE METALS BY AR+-IONS OF 100-1000 EV
GERHARD, W
OECHSNER, H
[J]. ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1975, 22 (01): : 41 - 48
[7] GERHARD W, 1975, Z PHYS B CON MAT, V22, P31, DOI 10.1007/BF01325457
[8] GIBER J, 1980, S SPUTTERING, P697
[9] ON THE ENERGY AND ANGULAR-DISTRIBUTION OF SPUTTERED POLYATOMIC-MOLECULES
HARING, RA
ROOSENDAAL, HE
ZALM, PC
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 28 (02) : 205 - 213
[10] REACTIVE SPUTTERING OF SIMPLE CONDENSED GASES BY KEV IONS .3. KINETIC-ENERGY DISTRIBUTIONS
HARING, RA
PEDRYS, R
OOSTRA, DJ
HARING, A
DEVRIES, AE
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 5 (03) : 483 - 488

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