ON THE ENERGY AND ANGULAR-DISTRIBUTION OF SPUTTERED POLYATOMIC-MOLECULES

被引：44

作者：

HARING, RA

ROOSENDAAL, HE

ZALM, PC

机构：

[1] PHILIPS RES LABS,EINDHOVEN,NETHERLANDS

[2] N HOLLAND PHYS PUBLISHING,AMSTERDAM,NETHERLANDS

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 28卷 / 02期

关键词：

D O I：

10.1016/0168-583X(87)90106-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：205 / 213

页数：9

共 30 条

[1] EXPERIMENTAL-EVIDENCE FOR THE ABSENCE OF LOCAL THERMAL-EQUILIBRIUM IN CHEMICAL SPUTTERING [J].

DIELEMAN, J ;

SANDERS, FHM ;

ZALM, PC .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :809-813

[2] ORGANIC-MOLECULE EJECTION FROM SURFACES DUE TO HEAVY PARTICLE BOMBARDMENT [J].

GARRISON, BJ .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1982, 104 (23) :6211-6217

[3] MOLECULAR DESORPTION INDUCED BY HEAVY PARTICLE BOMBARDMENT OF SOLIDS [J].

GARRISON, BJ .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1983, 53 (SEP) :243-254

[4] SPUTTERING OF CONDENSED NOBLE-GASES BY KEV HEAVY-IONS [J].

HARING, RA ;

PEDRYS, R ;

HARING, A ;

DEVRIES, AE .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01) :40-54

[5]

HARING RA, 1984, THESIS LEIDEN U FM A

[6]

Herzberg G., 1979, MOL SPECTRA MOL STRU, VIV

[7] THE MECHANISMS OF SPUTTERING .1. PROMPT AND SLOW COLLISIONAL SPUTTERING [J].

KELLY, R .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1984, 80 (3-4) :273-317

[8] ARGON-ION ASSISTED ETCHING OF SILICON BY MOLECULAR CHLORINE [J].

KOLFSCHOTEN, AW ;

HARING, RA ;

HARING, A ;

DEVRIES, AE .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (10) :3813-3818

[9]

KOLFSCHOTEN AW, COMMUNICATION

[10] ENERGY-DISTRIBUTION OF SPUTTERED CLUSTERS [J].

KONNEN, GP ;

TIP, A ;

VRIES, AED .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1975, 26 (1-2) :23-29

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