THE MECHANISMS OF SPUTTERING .1. PROMPT AND SLOW COLLISIONAL SPUTTERING

被引：76

作者：

KELLY, R

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1984年 / 80卷 / 3-4期

关键词：

D O I：

10.1080/00337578408216469

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

引用

页码：273 / 317

页数：45

共 129 条

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