THE MECHANISMS OF SPUTTERING .1. PROMPT AND SLOW COLLISIONAL SPUTTERING

被引:76
作者
KELLY, R
机构
来源
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1984年 / 80卷 / 3-4期
关键词
D O I
10.1080/00337578408216469
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
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页码:273 / 317
页数:45
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