NUCLEATION-CONTROLLED THIN-FILM INTERACTIONS - SOME SILICIDES

被引：47

作者：

ANDERSON, R ^{[1
]}

BAGLIN, J ^{[1
]}

DEMPSEY, J ^{[1
]}

HAMMER, W ^{[1
]}

DHEURLE, F ^{[1
]}

PETERSSON, S ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

APPLIED PHYSICS LETTERS | 1979年 / 35卷 / 03期

关键词：

D O I：

10.1063/1.91073

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Silicides formed by the interaction of a metal thin film with a single-crystal silicon substrate usually grow in layers according to diffusion- or reaction-controlled kinetics. The mechanism of the formation of five silicides, IrSi3, Rh4Si5, Hf Si2, NiSi2, and PdSi, share common aspects which set them categorically apart from IrSi1.75, RhSi, HfSi, NiSi, and Pd2Si, which form in the usual way. It is proposed that the nucleation process of IrSi 3, Rh4Si5, HfSi2, NiSi2, and PdSi results from the respective small driving forces and the ensuing importance of usually negligible stress and/or surface effects.

引用

页码：285 / 287

页数：3

共 13 条

[1] ALTERNATIVE MARKER EXPERIMENT IN FORMATION OF MO AND W SILICIDES
BAGLIN, J
DHEURLE, F
PETERSSON, S
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (04) : 289 - 290
[2] BAGLIN JEE, UNPUBLISHED
[3] COE DJ, 1974, METAL SEMICONDUCTOR, P74
[4] GROWTH AND TRANSFORMATION OF PD2SI ON (111), (110) AND (100) SI
HUTCHINS, GA
SHEPELA, A
[J]. THIN SOLID FILMS, 1973, 18 (02) : 343 - 363
[5] Li Chen-Min, 1978, METALL T A, V9, P1353, DOI DOI 10.1007/BF02661808
[6] FORMATION OF IRIDIUM SILICIDES FROM IR THIN-FILMS ON SI SUBSTRATES
PETERSSON, S
BAGLIN, J
HAMMER, W
DHEURLE, F
KUAN, TS
OHDOMARI, I
SOUSAPIRES, JD
TOVE, P
[J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) : 3357 - 3365
[7] STABILITY OF SOLID PHASES IN THE TERNARY SYSTEMS OF SILICON AND CARBON WITH RHENIUM AND THE 6 PLATINUM METALS
SEARCY, AW
FINNIE, LN
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1962, 45 (06) : 268 - 273
[8] SMITHELLS CJ, 1967, METALS REFERENCE BOO, P231
[9] ROLE OF MO13GE23 NUCLEATION IN DIFFUSION BETWEEN MOLYBDENUM AND ITS DIGERMANIDE
STEINMETZ, P
DUPRE, B
ROQUES, B
[J]. JOURNAL OF THE LESS-COMMON METALS, 1977, 53 (01): : 43 - 53
[10] TU KN, 1974, JPN J APPL PHYS, P669

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