ANALYSIS OF SURFACE CONTAMINANTS BY PLASMA CHROMATOGRAPHY MASS SPECTROSCOPY

被引：8

作者：

CARR, TW ^{[1
]}

机构：

[1] IBM CORP,DEPT F06,POUGHKEEPSIE,NY 12602

来源：

THIN SOLID FILMS | 1977年 / 45卷 / 01期

关键词：

D O I：

10.1016/0040-6090(77)90211-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：115 / 122

页数：8

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