3-LAYER OPTICAL-WAVEGUIDE FOR PHOTOLITHOGRAPHIC FABRICATION OF THIN-FILM LENSES

被引：1

作者：

AAGARD, RL ^{[1
]}

机构：

[1] HONEYWELL INC,RES CTR,BLOOMINGTON,MN 55420

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期

关键词：

D O I：

10.1116/1.569138

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：275 / 277

页数：3

共 8 条

AAGARD, RL .

[2] PLASMA ETCHING OF THIN METAL AND DIELECTRIC FILMS [J].

BERSIN, RL .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :169-169

[3] THIN-FILM LASER-TO-FIBER COUPLER [J].

BOIVIN, LP .

APPLIED OPTICS, 1974, 13 (02) :391-395

[4]

MILLER SP, 1975, IEEE S SONICS ULTRAS, P474

[5] OPTICAL GUIDED-WAVE FOCUSING AND DIFFRACTION [J].

SHUBERT, R ;

HARRIS, JH .

[6] HIGH-RESOLUTION LENSES FOR OPTICAL-WAVEGUIDES [J].

SPILLER, E ;

HARPER, JS .

APPLIED OPTICS, 1974, 13 (09) :2105-2108

[7] GEOMETRICAL OPTICS IN THIN FILM LIGHT GUIDES [J].

ULRICH, R ;

MARTIN, RJ .

[8] LUNEBURG LENS FOR OPTICAL-WAVEGUIDE USE [J].

ZERNIKE, F .