FEMTOSECOND-EXCIMER-LASER PATTERNING OF YBA2CU3O7 FILMS

被引:19
作者
SCHWAB, P
HEITZ, J
PROYER, S
BAUERLE, D
机构
[1] Inst.f Angewandte Physik, Johannes-Kepler-Universität Linz, Linz
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1991年 / 53卷 / 03期
关键词
42.55; 61.80; 74.70;
D O I
10.1007/BF00324265
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Projection patterning of Y-Ba-Cu-O films on (100) SrTiO3 and (100) MgO substrates using femtosecond KrF-excimer-laser pulses is reported
引用
收藏
页码:282 / 283
页数:2
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