KRF LASER-INDUCED ABLATION AND PATTERNING OF Y-BA-CU-O FILMS

被引：16

作者：

HEITZ, J ^{[1
]}

WANG, XZ ^{[1
]}

SCHWAB, P ^{[1
]}

BAUERLE, D ^{[1
]}

SCHULTZ, L ^{[1
]}

机构：

[1] SIEMENS AG,RES LABS,W-8520 ERLANGEN,GERMANY

来源：

JOURNAL OF APPLIED PHYSICS | 1990年 / 68卷 / 05期

关键词：

D O I：

10.1063/1.346519

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The ablation and patterning of Y-Ba-Cu-O films on (100) SrTiO3 and (100) MgO substrates by KrF excimer-laser light projection was investigated. Three different regimes of laser-material interactions were observed. Transition temperatures and critical current densities in laser-fabricated strip lines were investigated.

引用

页码：2512 / 2514

页数：3

共 6 条

[1] LASER-INDUCED FORMATION AND SURFACE PROCESSING OF HIGH-TEMPERATURE SUPERCONDUCTORS [J].