MAGNETRON SPUTTERING AND LASER PATTERNING OF HIGH TRANSITION-TEMPERATURE CU OXIDE-FILMS

被引：48

作者：

SCHEUERMANN, M

CHI, CC

TSUEI, CC

YEE, DS

CUOMO, JJ

LAIBOWITZ, RB

KOCH, RH

BRAREN, B

SRINIVASAN, R

PLECHATY, MM

机构：

来源：

关键词：

D O I：

10.1063/1.98986

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1951 / 1953

页数：3

共 11 条

[1] SIGNIFICANCE OF NEGATIVE-ION FORMATION IN SPUTTERING AND SIMS ANALYSIS
CUOMO, JJ
GAMBINO, RJ
HARPER, JME
KUPTSIS, JD
WEBBER, JC
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 281 - 287
[2] SUPERCONDUCTING BAPB1-XBIXO3 CERAMIC FILMS PREPARED BY R.F. SPUTTERING
GILBERT, LR
MESSIER, R
ROY, R
[J]. THIN SOLID FILMS, 1978, 54 (01) : 129 - 136
[3] QUANTUM INTERFERENCE DEVICES MADE FROM SUPERCONDUCTING OXIDE THIN-FILMS
KOCH, RH
UMBACH, CP
CLARK, GJ
CHAUDHARI, P
LAIBOWITZ, RB
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (03) : 200 - 202
[4] LAIBOWITZ RB, 1987, PHYS REV B, V35, P8822
[5] MOFFATT WG, 1984, HDB BINARY PHASE DIA
[6] NAITO M, IN PRESS J MATER RES
[7] PLECHATY MM, UNPUB
[8] BEHAVIORS OF HIGH-ENERGY ELECTRONS AND NEUTRAL ATOMS IN SPUTTERING OF BATIO3
SHINTANI, Y
NAKANISHI, K
TAKAWAKI, T
TADA, O
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1975, 14 (12) : 1875 - 1879
[9] HIGH SUPERCONDUCTING TRANSITION-TEMPERATURES IN SPUTTER-DEPOSITED YBACUO THIN-FILMS
SOMEKH, RE
BLAMIRE, MG
BARBER, ZH
BUTLER, K
JAMES, JH
MORRIS, GW
TOMLINSON, EJ
SCHWARZENBERGER, AP
STOBBS, WM
EVETTS, JE
[J]. NATURE, 1987, 326 (6116) : 857 - 859
[10] SRINIVASAN R, 1987, J APPL PHYS, V61, P374