BEHAVIORS OF HIGH-ENERGY ELECTRONS AND NEUTRAL ATOMS IN SPUTTERING OF BATIO3

被引：35

作者：

SHINTANI, Y

NAKANISHI, K

TAKAWAKI, T

TADA, O

机构：

[1] TOKUSHIMA UNIV,TECH COLL,TOKUSHIMA 770,JAPAN

[2] TOKUSHIMA UNIV,FAC ENGN,TOKUSHIMA 770,JAPAN

来源：

关键词：

D O I：

10.1143/JJAP.14.1875

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1875 / 1879

页数：5

共 9 条

[1] PRODUCTION OF HIGH-ENERGY NEUTRAL ATOMS BY SCATTERING OF IONS AT SOLID SURFACES AND ITS RELATION TO SPUTTERING
BRODIE, I
LAMONT, LT
JEPSEN, RL
[J]. PHYSICAL REVIEW LETTERS, 1968, 21 (17) : 1224 - &
[2] UBER DIE IONENREFLEXION UND SEKUNDARELEKTRONENEMISSION BEIM AUFTREFFEN VON ALKALIIONEN AUF REINE MOLYBDAN-OBERFLACHEN
BRUNNEE, C
[J]. ZEITSCHRIFT FUR PHYSIK, 1957, 147 (02): : 161 - 183
[3] ELECTRON EFFECTS IN SPUTTERING AND COSPUTTERING
CHAPMAN, BN
DOWNER, D
GUIMARAE.LJ
[J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (05) : 2115 - 2120
[4] DUSHMAN S, 1949, SCI F VACUUM TECHNIQ, pCH1
[5] COMPOSITION AND STRUCTURE OF SPUTTERED FILMS OF FERROELECTRIC NIOBATES
FOSTER, NF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01): : 251 - +
[6] RESEARCH STATUS AND DEVICE POTENTIAL OF FERROELECTRIC THIN-FILMS
FRANCOMBE, MH
[J]. IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1972, SU19 (02): : 199 - +
[7] PREPARATION AND PROPERTIES OF UNSUPPORTED POSITIVE COEFFICIENT THIN THERMISTOR FILMS
MENDELSOHN, LI
ORTH, ED
CURRAN, RE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (03): : 363 - +
[8] PRATT JH, 1971, J VAC SCI TECHNOL, V8, P256
[9] Study of slower ions and neutral radiation
Rostagni, A.
[J]. ZEITSCHRIFT FUR PHYSIK, 1934, 88 (1-2): : 55 - 75