ELECTRON EFFECTS IN SPUTTERING AND COSPUTTERING

被引：28

作者：

CHAPMAN, BN ^{[1
]}

DOWNER, D ^{[1
]}

GUIMARAE.LJ ^{[1
]}

机构：

[1] IMPERIAL COLL,DEPT ELECT ENGN,MAT SECT,LONDON,ENGLAND

来源：

JOURNAL OF APPLIED PHYSICS | 1974年 / 45卷 / 05期

关键词：

D O I：

10.1063/1.1663554

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：2115 / 2120

页数：6

相关论文

共 14 条

[1] PLASMA DIAGNOSTICS AND ENERGY TRANSPORT OF A DC DISCHARGE USED FOR SPUTTERING
BALL, DJ
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (07) : 3047 - &
[2] FOCUSING EFFECTS IN SPUTTER DEPOSITION
CHAPMAN, BN
[J]. THIN SOLID FILMS, 1971, 8 (05) : R41 - &
[3] CHAPMAN BN, 1972, 6 YUG S PHYS ION GAS
[4] PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE
COBURN, JW
KAY, E
[J]. APPLIED PHYSICS LETTERS, 1971, 18 (10) : 435 - &
[5] POSITIVE-ION BOMBARDMENT OF SUBSTRATES IN RF DIODE GLOW-DISCHARGE SPUTTERING
COBURN, JW
KAY, E
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) : 4965 - 4971
[6] COBURN JW, 1970, REV SCI INSTRUM, V41, P1218
[7] MEASUREMENTS OF IONIC SPECIES PRESENT IN RF DISCHARGES OF ARGON AND ARGON-CESIUM
GILKINSON, JL
HELD, H
CHANIN, LM
[J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (05) : 2350 - +
[8] ION SAMPLING THROUGH ANODE AND CATHODE OF A DC DISCHARGE
HELD, H
GILKINSON, JL
CHANIN, LM
[J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) : 4395 - +
[9] JACKSON GN, PRIVATE COMMUNICATIO
[10] MASSEY HSW, 1952, ELECTRONIC IONIC IMP