EXCIMER-LASER-INDUCED ETCHING OF CERAMIC PBTI1-XZRXO3

被引：41

作者：

EYETT, M ^{[1
]}

BAUERLE, D ^{[1
]}

WERSING, W ^{[1
]}

THOMANN, H ^{[1
]}

机构：

[1] SIEMENS AG,FORSCHUNGSLAB MUNCHEN,D-8000 MUNCHEN,FED REP GER

来源：

关键词：

D O I：

10.1063/1.339613

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1511 / 1514

页数：4

共 7 条

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YOUNG, WA .

[4] LASER-INDUCED CHEMICAL ETCHING OF CERAMIC PBTI1-XZRXO3 [J].

EYETT, M ;

BAUERLE, D ;

WERSING, W ;

LUBITZ, K ;

THOMANN, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 40 (04) :235-239

[5] LASER-INDUCED SURFACE METALLIZATION OF CERAMIC PLZT [J].

KAPENIEKS, A ;

EYETT, M ;

BAUERLE, D .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1986, 41 (04) :331-334

[6]

OTTO J, 1984, SPRINGER SER CHEM PH, V39, P320

[7]

SRINIVASAN R, 1984, SPRINGER SERIES CHEM, V39, P320