INFLUENCE OF THE BEAM SPOT SIZE ON ABLATION RATES IN PULSED-LASER PROCESSING

被引：83

作者：

EYETT, M

BAUERLE, D

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 24期

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D O I：

10.1063/1.98290

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2054 / 2055

页数：2

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[1] BAUERLE D, 1986, SPRINGER SERIES MATE, V1
[2] LASER-INDUCED FLUORESCENCE STUDIES OF EXCIMER LASER ABLATION OF AL2O3
DREYFUS, RW
KELLY, R
WALKUP, RE
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (21) : 1478 - 1480
[3] EXCIMER-LASER-INDUCED ETCHING OF CERAMIC PBTI1-XZRXO3
EYETT, M
BAUERLE, D
WERSING, W
THOMANN, H
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (04) : 1511 - 1514
[4] LASER SPUTTERING .3. THE MECHANISM OF THE SPUTTERING OF METALS LOW-ENERGY DENSITIES
KELLY, R
ROTHENBERG, JE
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) : 755 - 763
[5] POPRAWE R, 1984, I PHYS C SER, V72, P67
[6] OPTICAL-ABSORPTION EDGE OF LINBO3
REDFIELD, D
BURKE, WJ
[J]. JOURNAL OF APPLIED PHYSICS, 1974, 45 (10) : 4566 - 4571
[7] LASER SPUTTERING .2. THE MECHANISM OF THE SPUTTERING OF AL2O3
ROTHENBERG, JE
KELLY, R
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 1 (2-3) : 291 - 300
[8] SRINIVASAN R, 1987, NATO ASI SER, P359