Crystal growth of Nd:YAG laser films on various substrates by pulsed laser deposition

被引：28

作者：

Ezaki, M ^{[1
]}

Kumagai, H ^{[1
]}

Kobayashi, K ^{[1
]}

Toyoda, K ^{[1
]}

Obara, M ^{[1
]}

机构：

[1] RIKEN,INST PHYS & CHEM RES,WAKO,SAITAMA 35101,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 12B期

关键词：

waveguide laser; Nd:YAG laser crystal; optical films; YAG; pulsed laser deposition;

D O I：

10.1143/JJAP.34.6838

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Fabrication of textured Nd doped yttrium aluminum garnet (Y3Al5O12, YAG) crystalline thin films on Si and MgO single-crystal substrates by the pulsed laser deposition technique has been demonstrated for the first time. The films were characterized by means of Rutherford backscattering: spectrometry (RES), X-ray diffraction (XRD) analysis, and atomic force microscopy (AFM). The results indicate that the composition of these films is tile same as that uf YAG doped with Nd (8.3 at.%), and the: AFM image shows that the submicron Nd:YAG crystallites were oriented on tile silicon surface at the substrate temperature of 700 degrees C. The formation of these submicron crystallites was observed on the surface of Nd:YAG films grown on substrates having a large lattice mismatch with Nd:YAG.

引用

页码：6838 / 6841

页数：4

共 14 条

[1]

[Anonymous], XRAY POWDER DIFFRACT

[2] PREPARATION OF SINGLE-CRYSTAL Y3AL5O12 THIN-FILM BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION [J].