WORK-FUNCTION DEPENDENCE OF NEGATIVE-ION PRODUCTION DURING SPUTTERING

被引：188

作者：

YU, ML

机构：

来源：

PHYSICAL REVIEW LETTERS | 1978年 / 40卷 / 09期

关键词：

D O I：

10.1103/PhysRevLett.40.574

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：574 / 577

页数：4

共 10 条

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[9] DEPTH PROFILE DETECTION LIMIT OF 3X10(15) ATOM CM-3 FOR AS IN SI USING CS+ BOMBARDMENT NEGATIVE SECONDARY ION MASS-SPECTROMETRY [J].

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[10]

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