SPATIALLY SELECTIVE MODIFICATION OF GAAS/ALGAAS QUANTUM WELLS BY SIO2 CAPPING AND RAPID THERMAL ANNEALING

被引：60

作者：

CHI, JY ^{[1
]}

WEN, X ^{[1
]}

KOTELES, ES ^{[1
]}

ELMAN, B ^{[1
]}

机构：

[1] BRANDEIS UNIV,MARTIN FISHER SCH PHYS,WALTHAM,MA 02254

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 09期

关键词：

D O I：

10.1063/1.101776

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：855 / 857

页数：3

共 16 条

[1] INDIUM DIFFUSION IN THE CHEMICAL-POTENTIAL GRADIENT AT AN IN0.53GA0.47AS/IN0.52AL0.48AS INTERFACE [J].

BAIRD, RJ ;

POTTER, TJ ;

KOTHIYAL, GP ;

BHATTACHARYA, PK .

APPLIED PHYSICS LETTERS, 1988, 52 (24) :2055-2057

[2] ATOM DIFFUSION AND IMPURITY-INDUCED LAYER DISORDERING IN QUANTUM WELL III-V SEMICONDUCTOR HETEROSTRUCTURES [J].

DEPPE, DG ;

HOLONYAK, N .

JOURNAL OF APPLIED PHYSICS, 1988, 64 (12) :R93-R113

[3] STRIPE-GEOMETRY QUANTUM-WELL HETEROSTRUCTURE ALXGA1-XAS-GAAS LASERS DEFINED BY DEFECT DIFFUSION [J].

DEPPE, DG ;

GUIDO, LJ ;

HOLONYAK, N ;

HSIEH, KC ;

BURNHAM, RD ;

THORNTON, RL ;

PAOLI, TL .

APPLIED PHYSICS LETTERS, 1986, 49 (09) :510-512

[4] LASER-INDUCED DISORDERING OF GAAS-ALGAAS SUPERLATTICE AND INCORPORATION OF SI IMPURITY [J].

EPLER, JE ;

BURNHAM, RD ;

THORNTON, RL ;

PAOLI, TL ;

BASHAW, MC .

APPLIED PHYSICS LETTERS, 1986, 49 (21) :1447-1449

[5]

GREINER ME, 1984, THESIS STANFORD U

[6]

JAGANNATH C, 1986, PHYS REV B, V34, P7024

[7] THERMAL ANNEALING AND PHOTOLUMINESCENCE MEASUREMENTS ON ALXGA1-XAS-GAAS QUANTUM-WELL HETEROSTRUCTURES WITH SE AND MG SHEET DOPING [J].

KALISKI, RW ;

NAM, DW ;

DEPPE, DG ;

HOLONYAK, N ;

HSIEH, KC ;

BURNHAM, RD .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (03) :998-1005

[8] ALUMINUM ION-IMPLANTATION ENHANCED INTERMIXING OF GAAS-ALGAAS QUANTUM-WELL STRUCTURES [J].

KASH, K ;

TELL, B ;

GRABBE, P ;

DOBISZ, EA ;

CRAIGHEAD, HG ;

TAMARGO, MC .

JOURNAL OF APPLIED PHYSICS, 1988, 63 (01) :190-194

[9]

KIRBY PA, 1979, J APPL PHYS, V50, P4567

[10] MODIFICATION OF THE SHAPES OF GAAS/ALGAAS QUANTUM WELLS USING RAPID THERMAL ANNEALING [J].

KOTELES, ES ;

ELMAN, B ;

HOLMSTROM, RP ;

MELMAN, P ;

CHI, JY ;

WEN, X ;

POWERS, J ;

OWENS, D ;

CHARBONNEAU, S ;

THEWALT, MLW .

SUPERLATTICES AND MICROSTRUCTURES, 1989, 5 (03) :321-325

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