ENERGY-TRANSFER FROM NOBLE-GAS IONS TO SURFACES - COLLISIONS WITH CARBON, SILICON, COPPER, SILVER, AND GOLD IN THE RANGE 100-4000 EV

被引:51
作者
COUFAL, H [1 ]
WINTERS, HF [1 ]
BAY, HL [1 ]
ECKSTEIN, W [1 ]
机构
[1] INST PLASMAPHYS,W-8046 GARCHING,GERMANY
来源
PHYSICAL REVIEW B | 1991年 / 44卷 / 10期
关键词
D O I
10.1103/PhysRevB.44.4747
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The energy deposited into carbon, silicon, copper, silver, and gold surfaces by He+, Ar+, and Xe+ ions impinging with kinetic energy in the range 100-4000 eV has been measured. These studies employed a highly sensitive calorimeter together with a modified physical electronics instrument ion gun. Pulses of ions from the gun were directed at the film that had been evaporated directly onto the pyroelectric material. A voltage proportional to the energy deposited is developed across the material and sensed with a lock-in detector. Xe+ deposits more than 95% of its energy between 500 and 4000 eV for all materials. The other ions deposit at least 80% of their energy in this range. The dependence of energy deposition upon ion and substrate mass and ion energy is about that expected from calculations and physical principles. The energy reflection from surfaces is also investigated by computer simulation using the TRIM.SP program. The experimental trends are semiquantitatively reproduced by the simulation, but there are some quantitative differences in the absolute results. As would be expected from previous calculations, the energy-reflection coefficients do not appear to scale with the ratio of target mass to ion mass or with reduced energy. The implication of these results for the understanding of collisional processes at solid surfaces will be discussed.
引用
收藏
页码:4747 / 4758
页数:12
相关论文
共 29 条
[11]   REFLECTION OF KINETIC-ENERGY DURING BOMBARDMENT OF POLYCRYSTALLINE SOLIDS WITH HE AND NE IONS [J].
HILDEBRANDT, D ;
MANNS, R .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1976, 38 (02) :K155-K157
[12]  
ITO R, UNPUB
[13]   MEASUREMENTS OF ENERGY REFLECTION FROM METALS BOMBARDED WITH KEV-D AND HE IONS AT VARIOUS ANGLES OF INCIDENCE [J].
KOBOROV, NN ;
KURNAEV, VA ;
TELKOVSKY, VG ;
ZHABREV, GI .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 69 (1-2) :135-142
[14]  
LANGLEY RA, 1984, NUCL FUSION, P12
[15]  
LINDHARD J, 1953, DAN VIDENSK SELSK MA, V25, P15
[16]   PARTICLE AND ENERGY REFLECTION FROM SOLID-SURFACES [J].
MASHKOVA, ES .
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1981, 54 (1-2) :1-27
[17]  
MASHKOVA WS, 1985, MEDIUM ENERGY ION RE
[18]   UNIVERSAL RELATIONS FOR REFLECTION OF KEV LIGHT-IONS FROM SOLID TARGETS [J].
MORITA, K ;
TABATA, T ;
ITO, R .
JOURNAL OF NUCLEAR MATERIALS, 1984, 128 (DEC) :681-686
[19]  
OCONNOR J, 1986, NUCL INSTRUM METH B, V15, P14
[20]  
OEN OS, 1976, NUCL INSTRUM METHODS, V132, P647, DOI 10.1016/0029-554X(76)90806-5