共 13 条
[1]
ARMITAGE J, 1988, P SPIE, V921, P208
[2]
DEFORMATION OF X-RAY-LITHOGRAPHY MASKS DURING TOOL CHUCKING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (06)
:3208-3211
[3]
ELASTIC-DEFORMATION OF X-RAY-LITHOGRAPHY MASKS UNDER EXTERNAL LOADINGS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1991, 9 (06)
:3306-3309
[4]
CULLMANN E, 1987, SPIE, V773, P2
[5]
X-RAY STEPPER EXPOSURE SYSTEM PERFORMANCE AND STATUS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1990, 8 (06)
:2002-2007
[6]
HUGHLETT E, 1991, P SOC PHOTO-OPT INS, V1465, P100
[7]
ISHIARA S, 1990, NTT REVIEW, V2, P4
[8]
OPTIMAL-DESIGN OF AN X-RAY-LITHOGRAPHY MASK
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1991, 9 (06)
:3333-3337
[9]
LESOINE G, 1990, P SOC PHOTO-OPT INS, V1263, P131
[10]
OBERSCHMIDT JM, 1992, P SOC PHOTO-OPT INS, V1671, P324, DOI 10.1117/12.136017