AN AUGER-ELECTRON SPECTROSCOPY, X-RAY PHOTOELECTRON-SPECTROSCOPY, SECONDARY ION MASS-SPECTROMETRY AND BULK ANALYSIS OF PYROLYTIC BORON-NITRIDE CRUCIBLES AFTER VACUUM BAKING

被引：8

作者：

CHAMBERS, FA

ZAJAC, GW

FLEISCH, TH

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.583511

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：1310 / 1315

页数：6

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