THEORY OF THIN-FILM ORIENTATION BY ION-BOMBARDMENT DURING DEPOSITION

被引:27
作者
BRADLEY, RM
HARPER, JME
SMITH, DA
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词
D O I
10.1116/1.574498
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:1792 / 1793
页数:2
相关论文
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JOURNAL OF APPLIED PHYSICS, 1986, 60 (12) :4160-4164
[2]  
Mader S., 1970, HDB THIN FILM TECHNO
[3]  
ROOSENDAAL HE, 1981, TOPICS APPLIED PHYSI, V47
[4]   ALIGNMENT OF THIN-FILMS BY GLANCING ANGLE ION-BOMBARDMENT DURING DEPOSITION [J].
YU, LS ;
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SMITH, DA .
APPLIED PHYSICS LETTERS, 1985, 47 (09) :932-933
[5]   CONTROL OF THIN-FILM ORIENTATION BY GLANCING ANGLE ION-BOMBARDMENT DURING GROWTH [J].
YU, LS ;
HARPER, JME ;
CUOMO, JJ ;
SMITH, DA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :443-447