THEORY OF THIN-FILM ORIENTATION BY ION-BOMBARDMENT DURING DEPOSITION

被引：27

作者：

BRADLEY, RM

HARPER, JME

SMITH, DA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574498

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

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页码：1792 / 1793

页数：2

相关论文

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[2]

Mader S., 1970, HDB THIN FILM TECHNO

[3]

ROOSENDAAL HE, 1981, TOPICS APPLIED PHYSI, V47

[4] ALIGNMENT OF THIN-FILMS BY GLANCING ANGLE ION-BOMBARDMENT DURING DEPOSITION [J].

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APPLIED PHYSICS LETTERS, 1985, 47 (09) :932-933

[5] CONTROL OF THIN-FILM ORIENTATION BY GLANCING ANGLE ION-BOMBARDMENT DURING GROWTH [J].

YU, LS ;

HARPER, JME ;

CUOMO, JJ ;

SMITH, DA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :443-447