PRODUCTION OF VACUUM - PAST, PRESENT AND FUTURE

被引：4

作者：

YARWOOD, J

机构：

[1] The School of Engineering and Science, The Polytechnic of Central London, London, W1M 8JS

来源：

VACUUM | 1979年 / 29卷 / 8-9期

关键词：

D O I：

10.1016/0042-207X(79)90162-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In the production of vacuum, the contributions by the great genius, Gaede are acknowledged (1978 was the centenary year of his birth); the claims are considered to produce 'clean' ultra-high vacua by the protagonists of (a) the most recent oil diffusion pump systems and (b) the turbomolecular pumps. The future is considered to be that of the cryopump, based on further developments of a refrigerator system. © 1979.

引用

页码：313 / 317

页数：5

共 18 条

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