共 6 条
[1]
MASKING OF DEPOSITED THIN-FILMS BY MEANS OF AN ALUMINUM-PHOTORESIST COMPOSITE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1974, 11 (01)
:458-460
[2]
KLEIN M, 1978, IEEE J SOLID-ST CIRC, V13, P577, DOI 10.1109/JSSC.1978.1051103
[3]
KURODA K, J APPL PHYS S, V18
[4]
KURODA K, 1978, 10TH P C SOL STAT DE
[6]
POWELL GW, 1964, T METALL SOC AIME, V230, P694