NEW HIGH-RESISTIVITY THIN-FILM RESISTOR MATERIAL FOR JOSEPHSON LOGIC-CIRCUITS

被引:5
作者
YAMADA, H
ISHIDA, A
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 03期
关键词
D O I
10.1116/1.570104
中图分类号
O59 [应用物理学];
学科分类号
摘要
An experimental investigation is reported of a high-resistivity thin-film resistor for Josephson logic devices. Resistivity measurements of Au//1// minus //xIn//x evaporated thin films demonstrate the existence of a resistivity maximum around x equals 0. 16 at liquid He temperature. A maximum resistivity of 0. 14 mu OMEGA m has been obtained, which is one order of magnitude higher than that of the previous AuIn//2 compound resistor. The temperature dependence and x-ray diffraction experiments suggest that the resistivity maximum appears in the transition region from Au-In solid solution phase to Au-In compound phase, indicating that the resistivity maximum is mainly attributed to impurity scattering in the solid solution.
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页码:875 / 877
页数:3
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