STATIC STOKES ELLIPSOMETER - GENERAL-ANALYSIS AND OPTIMIZATION

被引：43

作者：

BRUDZEWSKI, K

机构：

[1] Warsaw University of Technology, Department of Chemistry, Institute of Inorganic Technology, Warsaw, 00-664

来源：

JOURNAL OF MODERN OPTICS | 1991年 / 38卷 / 05期

关键词：

D O I：

10.1080/09500349114550871

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The static Stokes ellipsometer is analysed for the simultaneous measurements of all four Stokes parameters of fully or partially polarized light. The instrument matrix, which relates the output signal vector to the input Stokes vector is given explicitly. The procedure for the calibration of the ellipsometer to obtain experimentally the instrument matrix and the technique for the optimization and reduction of experimental errors of calibration is presented as well.

引用

页码：889 / 896

页数：8

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