共 10 条
[1]
FURUKAWA S, 1989, Patent No. 4885614
[9]
TILLACK B, IN PRESS MATER SCI T
[10]
SIGE/SI ELECTRONICS AND OPTOELECTRONICS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1993, 11 (03)
:1159-1167