PROPERTIES OF MOLYBDENUM FILMS PREPARED BY DECOMPOSITION OF CARBONYL

被引：10

作者：

DEROSA, AI ^{[1
]}

DOVE, DB ^{[1
]}

LOEHMAN, RE ^{[1
]}

机构：

[1] UNIV FLORIDA,DEPT MAT SCI & ENGN,GAINESVILLE,FL 32611

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期

关键词：

D O I：

10.1116/1.1318653

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：455 / 457

页数：3

共 15 条

[1]

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[2]

Bosnell J. R., 1970, Thin Solid Films, V6, P161, DOI 10.1016/0040-6090(70)90036-2

[3] EFFECT OF DEPOSITION PARAMETERS ON STRUCTURE AND RESISTIVITY OF MOLYBDENUM FILMS [J].

BOSNELL, JR ;

VOISEY, UC .

THIN SOLID FILMS, 1970, 6 (02) :107-&

[4]

CHANG JJ, UNPUBLISHED

[5] DECOMPOSITION OF MOLYBDENUM HEXACARBONYL [J].

FERGUSON, IF ;

AINSCOUGH, JB ;

MORSE, D ;

MILLER, AW .

NATURE, 1964, 202 (493) :1327-&

[6]

IVANOV VE, 1967, IZV AN SSSR NEORGAN, V3, P1972

[7]

LANDER JJ, 1948, T AM I MIN MET ENG, V175, P648

[8] COMPARISON OF CALORIMETRIC AND SPECTROSCOPIC ENTROPIES OF MOLYBDENUM HEXACARBONYL [J].

MONCHAMP, RR ;

COTTON, FA .

JOURNAL OF THE CHEMICAL SOCIETY, 1960, (APR) :1438-1440

[9]

MOND L, 1910, P CHEM SOC LOND, V26, P67

[10]

MOND L, 1910, J CHEM SOC, V97, P798

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