INP SURFACE CONDUCTING FILMS FROM ELECTRON-PULSE ANNEALING

被引:12
作者
DAVIES, DE
KENNEDY, EF
COMER, JJ
LORENZO, JP
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D O I
10.1063/1.91374
中图分类号
O59 [应用物理学];
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页码:922 / 924
页数:3
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    DAVIES, DE
    LORENZO, JP
    RYAN, TG
    FITZGERALD, JJ
    [J]. APPLIED PHYSICS LETTERS, 1979, 35 (08) : 631 - 633
  • [2] PULSED-ELECTRON-BEAM ANNEALING OF ION-IMPLANTATION DAMAGE
    GREENWALD, AC
    KIRKPATRICK, AR
    LITTLE, RG
    MINNUCCI, JA
    [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (02) : 783 - 787
  • [3] ANODIC-OXIDATION AND ELECTRICAL CARRIER CONCENTRATION PROFILES OF ION-IMPLANTED INP
    LORENZO, JP
    DAVIES, DE
    RYAN, TG
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (01) : 118 - 121