PREPARATION OF CD1-XYXSB2O6 THIN-FILM ON GLASS SUBSTRATE BY RADIO-FREQUENCY SPUTTERING

被引：37

作者：

YANAGAWA, K

OHKI, Y

OMATA, T

HOSONO, H

UEDA, N

KAWAZOE, H

机构：

[1] TOKYO INST TECHNOL,ENGN MAT RES LAB,MIDORI KU,YOKOHAMA,KANAGAWA 227,JAPAN

[2] INST MOLEC SCI,OKAZAKI,AICHI 444,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 04期

关键词：

D O I：

10.1063/1.112316

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Cd1-xYxSb2O6 thin films were deposited onto a silica glass substrate by rf sputtering method. The highest conductivity observed for Cd0.95Y0.05Sb2O6 thin films was 4.1 x 10 S cm-1, with a carrier concentration of 1.3 X 10(20) cm-3 and a Hall mobility of 1.9 cm2 V-1S-1. No distinct optical absorption band was observed from the visible to the infrared region. These observations show that Cd1-xYxSb2O6 thin films have characteristics of a transparent conductor, whose transparent wavelength region covers the near infrared.

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页码：406 / 408

页数：3

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