XPS INVESTIGATIONS OF THE INTERACTIONS OF HYDROGEN WITH THIN-FILMS OF ZIRCONIUM-OXIDE .2. EFFECTS OF HEATING A 26-ANGSTROM THICK-FILM AFTER TREATMENT WITH A HYDROGEN PLASMA

被引：61

作者：

LI, YS ^{[1
]}

WONG, PC ^{[1
]}

MITCHELL, KAR ^{[1
]}

机构：

[1] UNIV BRITISH COLUMBIA,DEPT CHEM,VANCOUVER,BC V6T 1Z1,CANADA

来源：

APPLIED SURFACE SCIENCE | 1995年 / 89卷 / 03期

基金：

加拿大自然科学与工程研究理事会;

关键词：

D O I：

10.1016/0169-4332(95)00032-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In order to help establish the role hydrogen plays in the oxidation and reduction of zirconium oxide thin films, XPS was used to study the effects of heating a 26 Angstrom thick ZrO2 film after a hydrogen-plasma treatment. The latter treatment produced a uniform hydrogen-trapped ZrO2 film. Heating to 425 degrees C yielded a reduced suboxide, ZrOx, particularly in the deeper regions of the film, but near the surface this heating produced a zirconium state with Zr3d(5/2) binding energy at 183.4 eV, which is higher than that of ZrO2 by about 0.5 eV. This new chemical state of zirconium appears especially related to Zr-OH bonding. This result, with the observed inhomogeneity of the film, strongly suggests that either H2O or OH- species migrate to the surface region of the hydrogen-trapped ZrO2 film during the heating process.

引用

页码：263 / 269

页数：7

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