ASTIGMATISM CORRECTION IN X-RAY-SCANNING PHOTOEMISSION MICROSCOPE WITH USE OF ELLIPTIC ZONE PLATE

被引:18
作者
ADE, H [1 ]
KO, CH [1 ]
ANDERSON, E [1 ]
机构
[1] UNIV CALIF BERKELEY,LAWRENCE BERKELEY LAB,CTR XRAY OPT,BERKELEY,CA 94720
关键词
D O I
10.1063/1.106437
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the impact of an elliptical, high resolution zone plate on the performance of an initially astigmatic soft x-ray scanning photoemission microscope. A zone plate with carefully calibrated eccentricity has been used to eliminate astigmatism arising from transport optics, and an improvement of about a factor of 3 in spatial resolution was achieved. The resolution is still dominated by the source size and chromatic aberrations rather than by diffraction and coma, and a further gain of about a factor of 2 in resolution is possible. Sub 100 nm photoemission microscopy with primary photoelectrons is now within reach.
引用
收藏
页码:1040 / 1042
页数:3
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