ELECTRICAL-CONDUCTION AND DIELECTRIC BREAKDOWN IN SILICON DIOXIDE FILMS ON SILICON

被引:134
作者
OSBURN, CM
WEITZMAN, EJ
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D O I
10.1149/1.2404270
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:603 / +
页数:1
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