共 17 条
[1]
SINGLE SILICON ETCHING PROFILE SIMULATION
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1988, 27 (01)
:95-99
[3]
DAHL D, 1988, SIMION PC PS2 USERS
[4]
FANG S, 1991, TECH DIG IEDM, P61
[7]
FUJIWARA N, 1988, 10TH P S DRY PROC TO, P9
[9]
HASHIMOTO K, 1991, P S DRY PROCESS, P93
[10]
Kure T, 1992, S VLSI TECHN SEATTL, P49