ENERGIES OF CU-1(+) IONS SPUTTERED FROM CU BY VERY LOW-ENERGY (50EV LESS-THAN E LESS-THAN 1 KEV) INERT-GAS IONS

被引：49

作者：

HART, RG

COOPER, CB

机构：

来源：

关键词：

D O I：

10.1016/0039-6028(80)90159-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：105 / 118

页数：14

共 38 条

[1] ADYLOV AA, 1970, FIZ TVERD TELA+, V11, P1441
[2] SPUTTERING MECHANISM FOR LOW-ENERGY LIGHT-IONS
BEHRISCH, R
MADERLECHNER, G
SCHERZER, BMU
ROBINSON, MT
[J]. APPLIED PHYSICS, 1979, 18 (04): : 391 - 398
[3] Benninghoven A., 1974, International Journal of Mass Spectrometry and Ion Physics, V13, P415, DOI 10.1016/0020-7381(74)83021-4
[4] SURFACE INVESTIGATION OF SOLIDS BY STATICAL METHOD OF SECONDARY ION MASS SPECTROSCOPY (SIMS)
BENNINGHOVEN, A
[J]. SURFACE SCIENCE, 1973, 35 (01) : 427 - 457
[5] ENERGY-DISTRIBUTIONS OF SECONDARY IONS
BLAISE, G
SLODZIAN, G
[J]. REVUE DE PHYSIQUE APPLIQUEE, 1973, 8 (02): : 105 - 116
[6] BUEHLER RJ, 1977, INT J MASS SPECTROSC, V23
[7] DETECTION EFFICIENCY OF A CONTINUOUS CHANNEL ELECTRON MULTIPLIER FOR POSITIVE IONS
BURROUS, CN
LIEBER, AJ
ZAVIANTSEFF, VT
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1967, 38 (10) : 1477 - +
[8] OXIDATION OF ALUMINUM STUDIED BY SIMS AT LOW ENERGIES
DAWSON, PH
[J]. SURFACE SCIENCE, 1976, 57 (01) : 229 - 240
[9] Dennis E., 1972, Radiation Effects, V13, P243, DOI 10.1080/00337577208231186
[10] MASS-DEPENDENT CHANNEL ELECTRON MULTIPLIER OPERATION
FIELDS, SA
BURCH, JL
ORAN, WA
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1977, 48 (08) : 1076 - 1078