BELOW-BANDGAP REFRACTIVE-INDEX OF ALAS GAAS MULTIPLE QUANTUM-WELLS

被引:2
作者
HUBLER, GK [1 ]
WADDELL, CN [1 ]
DONOVAN, EP [1 ]
ZAVADA, JM [1 ]
机构
[1] USA,RES OFF,RALEIGH,NC 27709
关键词
D O I
10.1007/BF00624977
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Precision reflection measurements were performed on GaAs/AlAs superlattices of the same composition but different layer spacings. Nonlinear-least-squares fits to the data were performed to a single layer. Measurements were extracted for the superlattice thickness, thickness of a disturbed interface layer between the superlattice and substrate, the uniformity in composition and/or spacing and the composition. It was demonstrated that these nondestructive measurements in the infrared region (3000 to 12 000 cm-1) in conjunction with a simple single layer model are capable of accurately yielding the above quantities with high precision.
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页码:S883 / S893
页数:11
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