SENSITIZER AGING EFFECTS ON METALIZATION AND IMAGING IN PHOTOSELECTIVE METAL DEPOSITION (PSMD) PROCESS

被引:7
作者
DAMICO, JF [1 ]
DEANGELO, MA [1 ]
机构
[1] WESTERN ELECT CO,ENGN RES CTR,PRINCETON,NJ 08540
关键词
D O I
10.1149/1.2403285
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1469 / 1475
页数:7
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