CORRECTION OF THE DISTORTED ELECTRON-BEAM SPOT DEFLECTED BY ELECTROSTATIC CROSSED DEFLECTION FIELDS

被引：3

作者：

BABA, N

KANAYA, K

机构：

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1981年 / 14卷 / 02期

关键词：

D O I：

10.1088/0022-3735/14/2/012

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：183 / 193

页数：11

共 6 条

[1] A METHOD OF CORRECTING THE DISTORTED SPOT SHAPE OF A DEFLECTED ELECTRON-PROBE BY MEANS OF DYNAMIC FOCUSING AND STIGMATOR
KANAYA, K
BABA, N
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1980, 13 (04): : 415 - 426
[2] KANAYA K, 1961, B ELECTROTECH LAB, V25, P641
[3] KANAYA K, 1969, B ELECTROTECHNOL LAB, V33, P1233
[4] KAWAKATSU H, 1961, RES ELECTROTECH LAB, P1
[5] POTENTIAL DISTRIBUTION AND FOCAL PROPERTIES OF ELECTROSTATIC QUADRUPOLE LENSES
OKAYAMA, S
KAWAKATSU, H
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1978, 11 (03): : 211 - 216
[6] SPOT DISTORTION CAUSED BY MAGNETIC DEFLECTION OF ELECTRON BEAM
WANG, CCT
[J]. JOURNAL OF APPLIED PHYSICS, 1967, 38 (13) : 4938 - +