NORMAL INCIDENCE REFLECTANCE OF ION-BEAM DEPOSITED SIC FILMS IN THE EUV

被引：40

作者：

KESKIKUHA, RAM

OSANTOWSKI, JF

HERZIG, H

GUM, JS

TOFT, AR

机构：

来源：

APPLIED OPTICS | 1988年 / 27卷 / 14期

关键词：

D O I：

10.1364/AO.27.002815

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2815 / 2816

页数：2

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