ABSOLUTE PARTIAL CROSS-SECTIONS FOR THE PARENT IONIZATION OF THE CFX (X=1-3) FREE-RADICALS BY ELECTRON-IMPACT

被引:105
作者
TARNOVSKY, V
BECKER, K
机构
[1] Physics Department, City College of the City University of New York, New York
关键词
D O I
10.1063/1.464594
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We report absolute partial electron-impact ionization cross sections from threshold to 200 eV for the formation of the parent CF(x+) ions from the CF(x) free radicals (x = 1-3 ). Fast (3-3.5 kV) beams of CF3, CF2, and CF radicals were prepared by near-resonant charge transfer of CF3+, CF2+, and CF+ with triethylamine (TEA), Xe, and NF3. The CF and CF3 neutral beams were found to contain primarily ground state neutral radicals with some evidence for the presence of a small amount of vibrational excitation (0.5 eV or less). Contributions to the CF2+ ion signal obtained at electron energies several electron volts below the 11.4 eV threshold for the ionization of ground state CF2 radicals indicate the presence of CF2 metastables (presumably in the B-3(1) state) in the CF2 neutral beam. The level of CF2 metastable contamination was found to depend critically on the exact experimental conditions. At 70 eV, the absolute parent ionization cross sections are 0.38 +/- 0.07 angstrom2 (CF3 --> CF3+), 1.03 +/- 0.16 angstrom2 (CF2 --> CF2+), and 1.25 +/- 0.19 angstrom2 (CF --> CF+), respectively.
引用
收藏
页码:7868 / 7874
页数:7
相关论文
共 35 条
[1]   THE D2A1-]C2T2 EMISSION BAND SYSTEM OF CF4+ [J].
AARTS, JFM ;
MASON, SM ;
TUCKETT, RP .
MOLECULAR PHYSICS, 1987, 60 (04) :761-769
[2]   DECOMPOSITION AND PRODUCT FORMATION IN CF4-O2 PLASMA-ETCHING SILICON IN THE AFTERGLOW [J].
BEENAKKER, CIM ;
VANDOMMELEN, JHJ ;
VANDEPOLL, RPJ .
JOURNAL OF APPLIED PHYSICS, 1981, 52 (01) :480-485
[3]  
BIAOCCHI FA, 1984, PHYS REV LETT, V533, P771
[4]   ON THE PARTIAL IONIZATION CROSS-SECTIONS FOR CF4 BY USE OF THE PULSED-ELECTRON-BEAM TIME-OF-FLIGHT METHOD [J].
BRUCE, MR ;
BONHAM, RA .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1993, 123 (02) :97-100
[5]   POSITIVE-ION PAIR PRODUCTION BY ELECTRON-IMPACT DISSOCIATIVE IONIZATION OF CF4 [J].
BRUCE, MR ;
MA, C ;
BONHAM, RA .
CHEMICAL PHYSICS LETTERS, 1992, 190 (3-4) :285-290
[6]  
CHASE MW, 1985, J PHYS CHEM REF DATA, V14, P1
[7]   CALCULATION OF ABSOLUTE ELECTRON-IMPACT IONIZATION CROSS-SECTION FUNCTIONS FOR SINGLE IONIZATION OF HE, NE, AR, KR, XE, N AND F [J].
DEUTSCH, H ;
MARK, TD .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 1987, 79 (03) :R1-R8
[8]  
DEUTSCH H, 1992, COMMUNICATION
[9]  
DEUTSCH H, IN PRESS INT J MASS
[10]   CROSS-SECTION MEASUREMENTS FOR ELECTRON-IMPACT IONIZATION OF ATOMS [J].
FREUND, RS ;
WETZEL, RC ;
SHUL, RJ ;
HAYES, TR .
PHYSICAL REVIEW A, 1990, 41 (07) :3575-3595