DECOMPOSITION AND PRODUCT FORMATION IN CF4-O2 PLASMA-ETCHING SILICON IN THE AFTERGLOW

[1] REACTION-KINETICS OF GROUND-STATE FLUORINE, F2P, ATOMS .2. REACTIONS FORMING INORGANIC FLUORIDES, STUDIED MASS SPECTROMETRICALLY [J]. JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1975, 71 : 2072 - 2084

[2] TROPOSPHERIC AND STRATOSPHERIC SINKS FOR HALOCARBONS - PHOTOOXIDATION, O(D)ATOM, AND OH RADICAL REACTIONS [J]. JOURNAL OF GEOPHYSICAL RESEARCH-OCEANS AND ATMOSPHERES, 1976, 81 (33): : 5765 - 5770

[3] BEENAKER CIM, 1979, 4 C P INT S PLASM CH, P125

[4] REACTION OF FLUORINE-ATOMS WITH SIO2 [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (10) : 6211 - 6213

[5] FOON R, 1975, PROGR REACTION KINET, V8, P81

[6] FRANKLIN JL, 1969, NSDSNBS26

[7] Gilmore F.R., 1965, J QUANT SPECTROSC RA, V5, P369, DOI [10.1016/0022-4073(65)90072-5, DOI 10.1016/0022-4073(65)90072-5]

[8] AFTERGLOWS [J]. REPORTS ON PROGRESS IN PHYSICS, 1973, 36 (10) : 1285 - 1364

[9] Harshbarger W. R., 1973, Journal of Electron Spectroscopy and Related Phenomena, V1, P319, DOI 10.1016/0368-2048(72)80035-5

[10] HEICKLEN J, 1969, ADV PHOTOCHEMISTRY, V7

[1] REACTION-KINETICS OF GROUND-STATE FLUORINE, F2P, ATOMS .2. REACTIONS FORMING INORGANIC FLUORIDES, STUDIED MASS SPECTROMETRICALLY [J]. JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1975, 71 : 2072 - 2084

[2] TROPOSPHERIC AND STRATOSPHERIC SINKS FOR HALOCARBONS - PHOTOOXIDATION, O(D)ATOM, AND OH RADICAL REACTIONS [J]. JOURNAL OF GEOPHYSICAL RESEARCH-OCEANS AND ATMOSPHERES, 1976, 81 (33): : 5765 - 5770

[3] BEENAKER CIM, 1979, 4 C P INT S PLASM CH, P125

[4] REACTION OF FLUORINE-ATOMS WITH SIO2 [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (10) : 6211 - 6213

[5] FOON R, 1975, PROGR REACTION KINET, V8, P81

[6] FRANKLIN JL, 1969, NSDSNBS26

[7] Gilmore F.R., 1965, J QUANT SPECTROSC RA, V5, P369, DOI [10.1016/0022-4073(65)90072-5, DOI 10.1016/0022-4073(65)90072-5]

[8] AFTERGLOWS [J]. REPORTS ON PROGRESS IN PHYSICS, 1973, 36 (10) : 1285 - 1364

[9] Harshbarger W. R., 1973, Journal of Electron Spectroscopy and Related Phenomena, V1, P319, DOI 10.1016/0368-2048(72)80035-5

[10] HEICKLEN J, 1969, ADV PHOTOCHEMISTRY, V7