REACTION OF FLUORINE-ATOMS WITH SIO2

被引：92

作者：

FLAMM, DL

MOGAB, CJ

SKLAVER, ER

机构：

[1] Bell Laboratories, Murray Hill

来源：

JOURNAL OF APPLIED PHYSICS | 1979年 / 50卷 / 10期

关键词：

D O I：

10.1063/1.325755

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The heterogeneous reaction of F atoms with SiO2 (thermal oxide) has been measured using a discharge-flow tube technique. The reaction probability for F atoms is εF= (1.63±0.15) ×10 -2 exp(-0.163 eV/kT) for 250<T<365 K.

引用

页码：6211 / 6213

页数：3

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