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MASS AND ENERGY-DEPENDENCE OF DEPTH RESOLUTION IN SECONDARY-ION MASS-SPECTROMETRY EXPERIMENTS WITH IODINE, OXYGEN, AND CESIUM BEAMS ON ALGAAS/GAAS MULTILAYER STRUCTURES

被引：36
作者：
MEURIS, M
VANDERVORST, W
DEBISSCHOP, P
AVAU, D
机构：
来源：
APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 16期
关键词：
D O I：
10.1063/1.101341
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1531 / 1533
页数：3
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