QUANTIFYING THE EFFECTS OF UNEVEN ETCHING DURING THE SIMS ANALYSIS OF PERIODIC DOPING STRUCTURES GROWN BY SILICON MBE

被引：12

作者：

MCPHAIL, DS

DOWSETT, MG

FOX, H

HOUGHTON, R

LEONG, WY

PARKER, EHC

PATEL, GK

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 11卷 / 1-2期

关键词：

D O I：

10.1002/sia.740110110

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：80 / 87

页数：8

共 13 条

[1] EXPERIMENTAL-STUDY OF ELECTRODE MATERIALS FOR USE IN A COLD-CATHODE OXYGEN DISCHARGE [J].

DOWSETT, MG ;

PARKER, EHC .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1983, 52 (2-3) :299-309

[2]

DOWSETT MG, 1986, SPRINGER SERIES CHEM, P176

[3]

DOWSETT MG, 1983, VACUUM TAIP, V36, P913

[4]

DUCKWORTH C, COMMUNICATION

[5]

Gavrilovic J., 1986, SIMS 5 P, P360

[6] DECONVOLUTION OF ATOMIC MIXING EFFECTS FROM SIMS DEPTH PROFILES [J].

KING, BV ;

TSONG, IST .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :793-797

[7]

KUBIAK RAA, 1980, J VAC SCI TECHNOL B, V3, P1102

[8] LOSS OF DEPTH RESOLUTION WITH DEPTH IN SECONDARY ION MASS-SPECTROMETRY (SIMS) DUE TO VARIATIONS IN ION DOSE DENSITY ACROSS THE RASTERED AREA [J].

MCPHAIL, DS ;

DOWSETT, MG ;

PARKER, EHC .

VACUUM, 1986, 36 (11-12) :997-1000

[9]

MCPHAIL DS, 1987, UNPUB SCANNING MICRO

[10]

OESCHNER H, 1986, SPRINGER SERIES CHEM, P371

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