LOSS OF DEPTH RESOLUTION WITH DEPTH IN SECONDARY ION MASS-SPECTROMETRY (SIMS) DUE TO VARIATIONS IN ION DOSE DENSITY ACROSS THE RASTERED AREA

被引：9

作者：

MCPHAIL, DS

DOWSETT, MG

PARKER, EHC

机构：

来源：

VACUUM | 1986年 / 36卷 / 11-12期

关键词：

D O I：

10.1016/0042-207X(86)90154-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：997 / 1000

页数：4

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