DIELECTRIC PROPERTIES OF REACTIVELY SPUTTERED FILMS OF ALUMINUM NITRIDE

被引：77

作者：

NOREIKA, AJ

FRANCOMBE, MH

ZEITMAN, SA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.1492658

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：194 / +

页数：1

共 8 条

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[3] SPACE CHARGE CONDUCTION AND ELECTRICAL BEHAVIOUR OF ALUMINIUM NITRIDE SINGLE CRYSTALS [J].

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[4] HERSTELLUNG DUNNER SCHICHTEN VON ALUMINIUMNITRID, GALLIUMNITRID SOWIE INDIUMNITRID UNTER EINER GASENTLADUNG [J].

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[5] SOME PROPERTIES OF ALUMINUM NITRIDE [J].

TAYLOR, KM ;

LENIE, C .

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[6]

VONHIPPEL AR, 1954, DIELECTRICS WAVES, P5

[7]

VONRENNER T, 1959, Z ANORG CHEM, V298, P22

[8]

WINSLOW DK, 1967, RADCTR67401 TECH REP

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