ISS STUDY OF THE OXIDATION OF AU ON CU (300-A) THIN-FILMS

被引:3
作者
NAGASAKA, M
VASOFSKY, R
HELBIG, HF
机构
[1] CLARKSON COLL TECHNOL,DEPT PHYS,POTSDAM,NY 13676
[2] CLARKSON COLL TECHNOL,INST COLLOID & SURFACE SCI,POTSDAM,NY 13676
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期
关键词
D O I
10.1116/1.569891
中图分类号
O59 [应用物理学];
学科分类号
摘要
Using ISS techniques, composition versus depth profiles were made of Au (800 A) on Cu (300 A) films before and after heating in vacuum or 10. 6 kPa of oxygen at 163 degree , 202 degree , and 250 degree C for 10, 100, and 1000 minutes. Prior to heating, small amounts of Cu were found on the surface but not in the bulk of the gold. Heating the double layer film in vacuum at 250 degree C for 1000 minutes resulted in a homogeneous Au-Cu film. On the other hand, heating the double layer in oxygen produced an inverted structure wherein the Au was found to lie beneath a gold-free copper oxide overlayer (324 A).
引用
收藏
页码:151 / 154
页数:4
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