VERIFICATION OF A MAXWELLIAN ELECTRON-ENERGY DISTRIBUTION IN THE ICP

被引：50

作者：

HUANG, M ^{[1
]}

YANG, PY ^{[1
]}

HANSELMAN, DS ^{[1
]}

MONNIG, CA ^{[1
]}

HIEFTJE, GM ^{[1
]}

机构：

[1] INDIANA UNIV, DEPT CHEM, BLOOMINGTON, IN 47405 USA

来源：

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY | 1990年 / 45卷 / 4-5期

关键词：

D O I：

10.1016/0584-8547(90)80126-4

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

A 20-Hz frequency-doubled Q-switched Nd : YAG laser has been used to measure Thomson-scattering spectra from an inductively coupled argon plasma (ICP). The experimental data were treated with a non-linear regression curve-fitting program to determine electron temperatures and electron number densities under different plasma operating conditions. A comparison of the measured Thomson-scattering spectra with the corresponding fitted curves indicates that the electron energy distributions in the ICP are very close to Maxwellian under a wide range of sample-introduction conditions and at locations above, below, and at the tip of the "bullet". As a result, electron temperature can be used as a meaningful fundamental parameter. The theory used in this study is briefly reviewed and the detailed experimental considerations are described. © 1990.

引用

页码：511 / 520

页数：10

共 40 条

[1] EVALUATION OF AN ELECTRON-DIFFUSION MODEL FOR THE CALCULATION OF NON-EQUILIBRIUM ELECTRON CONCENTRATIONS IN AN INDUCTIVELY COUPLED ARGON PLASMA FOR SPECTROCHEMICAL ANALYSIS [J].