ELECTRONIC-PROPERTIES OF MICROCRYSTALLINE SILICON FILMS PREPARED IN A GLOW-DISCHARGE PLASMA

被引:99
作者
SPEAR, WE
WILLEKE, G
LECOMBER, PG
FITZGERALD, AG
机构
来源
JOURNAL DE PHYSIQUE | 1981年 / 42卷 / NC4期
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D O I
10.1051/jphyscol:1981454
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页码:257 / 260
页数:4
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