SENSING LIQUID PROPERTIES WITH THICKNESS-SHEAR MODE RESONATORS

被引：171

作者：

MARTIN, SJ

FRYE, GC

WESSENDORF, KO

机构：

[1] Microsensor Research and Development Department, Sandia National Laboratories, Albuquerque, NM

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 44卷 / 03期

关键词：

LIQUID SENSORS; THICKNESS-SHEAR MODE RESONATORS;

D O I：

10.1016/0924-4247(94)00806-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The responses of smooth- and textured-surface thickness-shear mode (TSM) resonators in liquid are examined. Smooth devices, which viscously entrain a layer of contacting liquid, exhibit a response that depends on the product of liquid density and viscosity. Textured-surface devices, which also trap liquid in surface crevices, pores, etc., exhibit an additional response that depends on liquid density alone. Combining smooth- and textured-surface resonators in a monolithic sensor enables the liquid density and viscosity to be extracted simultaneously.

引用

页码：209 / 218

页数：10

共 26 条

[11] EFFECT OF SURFACE-ROUGHNESS ON THE RESPONSE OF THICKNESS-SHEAR MODE RESONATORS IN LIQUIDS
MARTIN, SJ
FRYE, GC
RICCO, AJ
SENTURIA, SD
[J]. ANALYTICAL CHEMISTRY, 1993, 65 (20) : 2910 - 2922
[12] MARTIN SJ, 1991 P IEEE ULTR S L, P393
[13] MARTIN SJ, 1993 P IEEE FREQ CON, P603
[14] COMPUTATION OF EQUIVALENT-CIRCUIT PARAMETERS OF QUARTZ CRYSTALS IN CONTACT WITH LIQUIDS AND STUDY OF LIQUID PROPERTIES
MURAMATSU, H
TAMIYA, E
KARUBE, I
[J]. ANALYTICAL CHEMISTRY, 1988, 60 (19) : 2142 - 2146
[15] NUMURA T, 1980, NIPPON KAGAKU KAISHI, P1621
[16] Rosenbaum J. F., 1988, BULK ACOUSTIC WAVE T
[17] VERWENDUNG VON SCHWINGQUARZEN ZUR WAGUNG DUNNER SCHICHTEN UND ZUR MIKROWAGUNG
SAUERBREY, G
[J]. ZEITSCHRIFT FUR PHYSIK, 1959, 155 (02): : 206 - 222
[18] SCHUMACHER R, 1985, SURF SCI, V163, pL621, DOI 10.1016/0039-6028(85)90835-0
[19] THE QUARTZ MICROBALANCE - A NOVEL-APPROACH TO THE INSITU INVESTIGATION OF INTERFACIAL PHENOMENA AT THE SOLID LIQUID JUNCTION
SCHUMACHER, R
[J]. ANGEWANDTE CHEMIE-INTERNATIONAL EDITION IN ENGLISH, 1990, 29 (04): : 329 - 343
[20] SEO M, 1990, FAL EL SOC M SEATTL, P272

← 1 2 3 →