MEV ION-IMPLANTATION OF N INTO TI FOR SURFACE HARDENING

被引：22

作者：

CUI, FZ ^{[1
]}

VREDENBERG, AM ^{[1
]}

SARIS, FW ^{[1
]}

机构：

[1] FOM,INST ATOM & MOLEC PHYS,1098 SJ AMSTERDAM,NETHERLANDS

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 22期

关键词：

D O I：

10.1063/1.100302

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2152 / 2154

页数：3

共 14 条

[1]

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[4] MODIFICATION OF TRIBOLOGICAL CHARACTERISTICS OF METALS AFTER NITROGEN IMPLANTATION. [J].

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[6] ALGORITHMS FOR THE RAPID SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA [J].

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[7]

HARTLEY NEW, 1980, ION IMPLANTATION, P321

[8]

HUBLER GK, 1985, NUCL INSTRUM METH B, V7-8, P151, DOI 10.1016/0168-583X(85)90547-6

[9] SOME EXPERIMENTAL STUDIES ON METAL IMPLANTATION [J].

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[10]

POLMAN A, IN PRESS NUCL INST B

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